FIB-SEM is a serial sectioning technique allowing to image material structures with resolutions in the 10 nm range. For highly porous structures however, it is difficult to reconstruct the solid components from the resulting SEM image stack, since structures from lower layers »shine through« into the current plane.
Our morphological segmentation algorithm solves this problem. In order to validate it, a method for efficient simulation of realistic synthetic FIB-SEM images of porous structures has been developed.